Usage Charges for NIMS Internal Users

Instrument List

With Data Regsitration
or Registration N/A

Without Data Regsitration
Self-Use

Operation
Training

Technical
Service

Self-Use

Operation
Traning

Technical
Service

EB Lithography [JBX-8100FS]
EB Lithography [ELS-F125]
¥11,000 ¥14,200 ¥17,400 ¥16,500 ¥21,300 ¥26,100
EB Lithography [ELS-BODEN100] ¥6,600 ¥9,800 ¥13,000 ¥9,900 ¥14,700 ¥19,500
Laser Lithography [DWL66+]
Maskless Lithography [DL-1000/NC2P]
Maskless Lithography [MLA150]
ICP-RIE [RV-APS-SE]
ICP-RIE [Spica #1]
ICP-RIE [Spica #2]

FE-SEM+EDX[S-4800]
FE-SEM+EDX[SU8000]
FE-SEM+EDX[SU8230]
¥4,400 ¥7,600 ¥10,800 ¥6,600 ¥11,400 ¥16,200
Other Instruments ¥2,200 ¥5,400 ¥8,600 ¥3,300 ¥8,100 ¥12,900

※Applicable as April 1st, 2024  (Tax Excluded)

Important Note

  1. The table above shows the unit price per hour (tax excluded) and it will be multiplied by the usage hours*.
  2. 15-minute reservation is the minimum unit and the usage less than that time shall be reserved for 15 minutes.
  3. Self-Use: Instruments will be operated on your own upon issue of operation license.
  4. Operation Training: Training will be given for acquisition of operation license.
  5. Technical Service: For those who have difficulty visiting NIMS, part of fabrication process will be carried out by staff.
  6. Instrument usage charges are included in the unit prices for operation training/technical service.

※"Usage hours" means the reservation time (=occupation of the instrument: including the time necessary for starting up/shutting down ).

Price Table for Internal Use

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Contact

Please contact NIMS Nanofabrication Unit for inquiries regarding this page.

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  • 【Update】Mar. 14, 2024
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