NIMS Nanofabrication Unit Price Table (Large Enterprises) *1
※Applicable as of July 1st, 2025 (Tax Excluded)
| ARIM (Data Provision) *2 | ARIM (No Data Provision) | NOF (Undisclosed Use) | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Instrument List | Self-Use |
Operation Training |
Technical Service | Self-Use | Operation Training | Technical Service | Self-Use | Operation Training | Technical Service |
| EB Lithography [JBX-8100FS] | ¥30,500 | ¥38,500 | N/A | ¥58,000 | ¥74,000 | ¥90,000 | ¥75,400 | ¥96,200 | ¥117,000 |
| EB Lithography [ELS-BODEN100] | ¥19,500 | ¥27,500 | N/A | ¥36,000 | ¥52,000 | ¥68,000 | ¥46,800 | ¥67,600 | ¥88,400 |
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] ICP-RIE [RV-APS-SE] ICP-RIE [Spica #1] ICP-RIE [Spica #2] Ion Beam Milling [16IBE] FE-SEM+EDX [S-4800] FE-SEM+EDX [SU8000] FE-SEM+EDX [SU8230] |
¥14,000 | ¥22,000 | N/A | ¥25,000 | ¥41,000 | ¥57,000 | ¥32,500 | ¥53,300 | ¥74,100 |
| Other Instruments *3 | ¥8,500 | ¥16,500 | N/A | ¥14,000 | ¥30,000 | ¥46,000 | ¥18,200 | ¥39,000 | ¥59,800 |
NIMS Nanofabrication Unit Price Table (Small to Medium Enterprises) *1
※Applicable as of July 1st, 2025 (Tax Excluded)
| ARIM (Data Provision) *2 | ARIM (No Data Provision) | NOF (Undisclosed Use) | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Instrument List | Self-Use |
Operation Training |
Technical Service | Self-Use | Operation Training | Technical Service | Self-Use | Operation Training | Technical Service |
| EB Lithography [JBX-8100FS] | ¥25,000 | ¥31,400 | N/A | ¥30,500 | ¥38,500 | ¥46,500 | ¥39,650 | ¥50,050 | ¥60,450 |
| EB Lithography [ELS-BODEN100] | ¥16,200 | ¥22,600 | N/A | ¥19,500 | ¥27,500 | ¥35,500 | ¥25,350 | ¥35,750 | ¥46,150 |
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] ICP-RIE [RV-APS-SE] ICP-RIE [Spica #1] ICP-RIE [Spica #2] Ion Beam Milling [16IBE] FE-SEM+EDX [S-4800] FE-SEM+EDX [SU8000] FE-SEM+EDX [SU8230] |
¥11,800 | ¥18,200 | N/A | ¥14,000 | ¥22,000 | ¥30,000 | ¥18,200 | ¥28,600 | ¥39,000 |
| Other Instruments *3 | ¥7,400 | ¥13,800 | N/A | ¥8,500 | ¥16,500 | ¥24,500 | ¥11,050 | ¥21,450 | ¥31,850 |
NIMS Nanofabrication Unit Price Table (Start-ups・Academia) *1
※Applicable as of July 1st, 2025 (Tax Excluded)
| ARIM (Data Provision) *2 | ARIM (No Data Provision) | NOF (Undisclosed Use) | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Instrument List | Self-Use | Operation Training | Technical Service | Self-Use | Operation Training | Technical Service | Self-Use | Operation Training | Technical Service |
| EB Lithography [JBX-8100FS] | ¥14,000 | ¥17,200 | N/A | ¥19,500 | ¥24,300 | ¥29,100 | ¥25,350 | ¥31,590 | ¥37,830 |
| EB Lithography [ELS-BODEN100] | ¥9,600 | ¥12,800 | N/A | ¥12,900 | ¥17,700 | ¥22,500 | ¥16,770 | ¥23,010 | ¥29,250 |
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] ICP-RIE [RV-APS-SE] ICP-RIE [Spica #1] ICP-RIE [Spica #2] Ion Beam Milling [16IBE] FE-SEM+EDX [S-4800] FE-SEM+EDX [SU8000] FE-SEM+EDX [SU8230] |
¥7,400 | ¥10,600 | N/A | ¥9,600 | ¥14,400 | ¥19,200 | ¥12,480 | ¥18,720 | ¥24,960 |
| Other Instruments *3 | ¥5,200 | ¥8,400 | N/A | ¥6,300 | ¥11,100 | ¥15,900 | ¥8,190 | ¥14,430 | ¥20,670 |
*1 Capital stock over 100 million yen = large enterprise, less than 100 million yen = small to medium-sized enterprise.
If you're Start-up, please contact us.
*2 Applicable only when “data provision” is selected and the data is registered on RDE system.
*3 ARIM (Data Provision) is not available for some equipment.
Remarks
- The table above shows the unit price per hour (tax excluded) and it will be multiplied by the usage hours*.
- 15-minute reservation is the minimum unit and the usage less than that time shall be reserved for 15 minutes.
- Self-Use: Instruments will be operated on your own upon issue of operation license.
- Operation Training: Training will be given for acquisition of operation license.
- Technical Service: For those who have difficulty visiting NIMS, part of fabrication process will be carried out by staff.
- Instrument usage charges are included in the unit prices for operation training/technical service.
※"Usage hours" means the reservation time (=occupation of the instrument: including the time necessary for starting up/shutting down ).
