NIMS Nanofabrication Unit Price Table (Large Enterprises) *1
※Applicable as of April 1st, 2023 (Tax Excluded)
| ARIM (Data Provision) *2 | ARIM (No Data Provision) | NOF (Undisclosed Use) | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Instrument List | Self- Use |
Tech. Support |
Fab. Service | Self- Use | Tech. Support | Fab. Service | Self- Use | Tech. Support | Fab. Service |
| EB Lithography [ELS-F125] | ¥27,000 | ¥34,500 | N/A | ¥52,000 | ¥67,000 | ¥82,000 | ¥67,600 | ¥87,100 | ¥106,600 |
| EB Lithography [ELS-BODEN100] | ¥17,000 | ¥24,500 | N/A | ¥32,000 | ¥47,000 | ¥62,000 | ¥41,600 | ¥61,100 | ¥80,600 |
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] ICP-RIE [RV-APS-SE] FE-SEM+EDX [S-4800] FE-SEM+EDX [SU8000] FE-SEM+EDX [SU8230] |
¥12,000 | ¥19,500 | N/A | ¥22,000 | ¥37,000 | ¥52,000 | ¥28,600 | ¥48,100 | ¥67,600 |
| Other Instruments *3 | ¥7,000 | ¥14,500 | N/A | ¥12,000 | ¥27,000 | ¥42,000 | ¥15,600 | ¥35,100 | ¥54,600 |
NIMS Nanofabrication Unit Price Table (Small to Medium Enterprises) *1
※Applicable as of April 1st, 2023 (Tax Excluded)
| ARIM (Data Provision) *2 | ARIM (No Data Provision) | NOF (Undisclosed Use) | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Instrument List | Self- Use |
Tech. Support |
Fab. Service | Self- Use | Tech. Support | Fab. Service | Self- Use | Tech. Support | Fab. Service |
| EB Lithography [ELS-F125] | ¥22,000 | ¥28,000 | N/A | ¥27,000 | ¥34,500 | ¥42,000 | ¥35,100 | ¥44,850 | ¥54,600 |
| EB Lithography [ELS-BODEN100] | ¥14,000 | ¥20,000 | N/A | ¥17,000 | ¥24,500 | ¥32,000 | ¥22,100 | ¥31,850 | ¥41,600 |
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] ICP-RIE [RV-APS-SE] FE-SEM+EDX [S-4800] FE-SEM+EDX [SU8000] FE-SEM+EDX [SU8230] |
¥10,000 | ¥16,000 | N/A | ¥12,000 | ¥19,500 | ¥27,000 | ¥15,600 | ¥25,350 | ¥35,100 |
| Other Instruments *3 | ¥6,000 | ¥12,000 | N/A | ¥7,000 | ¥14,500 | ¥22,000 | ¥9,100 | ¥18,850 | ¥28,600 |
NIMS Nanofabrication Unit Price Table (Academia) *1
※Applicable as of April 1st, 2023 (Tax Excluded)
| ARIM (Data Provision) *2 | ARIM (No Data Provision) | NOF (Undisclosed Use) | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Instrument List | Self- Use | Tech. Support | Fab. Service | Self- Use | Tech. Support | Fab. Service | Self- Use | Tech. Support | Fab. Service |
| EB Lithography [ELS-F125] | ¥12,000 | ¥15,000 | N/A | ¥17,000 | ¥21,500 | ¥26,000 | ¥22,100 | ¥27,950 | ¥33,800 |
| EB Lithography [ELS-BODEN100] | ¥8,000 | ¥11,000 | N/A | ¥11,000 | ¥15,500 | ¥20,000 | ¥14,300 | ¥20,150 | ¥26,000 |
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] ICP-RIE [RV-APS-SE] FE-SEM+EDX [S-4800] FE-SEM+EDX [SU8000] FE-SEM+EDX [SU8230] |
¥6,000 | ¥9,000 | N/A | ¥8,000 | ¥12,500 | ¥17,000 | ¥10,400 | ¥16,250 | ¥22,100 |
| Other Instruments *3 | ¥4,000 | ¥7,000 | N/A | ¥5,000 | ¥9,500 | ¥14,000 | ¥6,500 | ¥12,350 | ¥18,200 |
*1 Capital stock over 100 million yen = large enterprise, less than 100 million yen = small to medium-sized enterprise, universities and public research institutes = academia
*2 Applicable only when “data provision” is selected and the data is registered on RDE system.
*3 ARIM (Data Provision) is not available for some equipment.
Remarks
- The table above shows the unit price per hour (tax excluded) and it will be multiplied by the usage hours*.
- 15-minute reservation is the minimum unit and the usage less than that time shall be reserved for 15 minutes.
- Self-Use: Instruments will be operated on your own upon issue of operation license.
- Technical Support: Training will be given for acquisition of operation license.
- Fabrication Service: Samples will be fabricated by the facility staff on behalf of the user.
- Instrument usage charges are included in the unit prices for technical support/fabrication service.
※"Usage hours" means the reservation time (=occupation of the instrument: including the time necessary for starting up/shutting down ).
