Usage Charges for ARIM/NOF Users

NIMS Nanofabrication Unit Price Table (Large Enterprises) *1

※Applicable as of April 1st, 2023  (Tax Excluded)

  ARIM (Data Provision) *2 ARIM (No Data Provision) NOF (Undisclosed Use)
Instrument List Self-   Use 

Tech. Support

Fab. Service  Self-   Use  Tech. Support Fab. Service Self-   Use  Tech. Support Fab. Service 
EB Lithography  [ELS-F125] ¥27,000 ¥34,500 N/A ¥52,000 ¥67,000 ¥82,000 ¥67,600 ¥87,100 ¥106,600
EB Lithography [ELS-BODEN100] ¥17,000 ¥24,500 N/A ¥32,000 ¥47,000 ¥62,000 ¥41,600 ¥61,100 ¥80,600
Laser Lithography [DWL66+]
Maskless Lithography [DL-1000/NC2P]
Maskless Lithography [MLA150]
ICP-RIE [RV-APS-SE]
FE-SEM+EDX [S-4800]
FE-SEM+EDX [SU8000]
FE-SEM+EDX [SU8230]
¥12,000 ¥19,500 N/A ¥22,000 ¥37,000 ¥52,000 ¥28,600 ¥48,100 ¥67,600
Other Instruments *3 ¥7,000 ¥14,500 N/A ¥12,000 ¥27,000 ¥42,000 ¥15,600 ¥35,100 ¥54,600

NIMS Nanofabrication Unit Price Table (Small to Medium Enterprises) *1

※Applicable as of April 1st, 2023  (Tax Excluded)

  ARIM (Data Provision) *2 ARIM (No Data Provision) NOF (Undisclosed Use)
Instrument List Self-   Use  

Tech. Support  

Fab. Service Self-   Use   Tech. Support   Fab. Service Self-   Use   Tech. Support   Fab. Service
EB Lithography  [ELS-F125] ¥22,000 ¥28,000 N/A ¥27,000 ¥34,500 ¥42,000 ¥35,100 ¥44,850 ¥54,600
EB Lithography [ELS-BODEN100] ¥14,000 ¥20,000 N/A ¥17,000 ¥24,500 ¥32,000 ¥22,100 ¥31,850 ¥41,600
Laser Lithography [DWL66+]
Maskless Lithography [DL-1000/NC2P]
Maskless Lithography [MLA150]
ICP-RIE [RV-APS-SE]
FE-SEM+EDX [S-4800]
FE-SEM+EDX [SU8000]
FE-SEM+EDX [SU8230]
¥10,000 ¥16,000 N/A ¥12,000 ¥19,500 ¥27,000 ¥15,600 ¥25,350 ¥35,100
Other Instruments *3 ¥6,000 ¥12,000 N/A ¥7,000 ¥14,500 ¥22,000 ¥9,100 ¥18,850 ¥28,600

NIMS Nanofabrication Unit Price Table (Academia) *1

※Applicable as of April 1st, 2023  (Tax Excluded)

  ARIM (Data Provision) *2 ARIM (No Data Provision) NOF (Undisclosed Use)
Instrument List Self-   Use   Tech. Support  Fab. Service Self-   Use   Tech. Support  Fab. Service Self-   Use   Tech. Support  Fab. Service
EB Lithography  [ELS-F125] ¥12,000 ¥15,000 N/A ¥17,000 ¥21,500 ¥26,000 ¥22,100 ¥27,950 ¥33,800
EB Lithography [ELS-BODEN100] ¥8,000 ¥11,000 N/A ¥11,000 ¥15,500 ¥20,000 ¥14,300 ¥20,150 ¥26,000
Laser Lithography [DWL66+]
Maskless Lithography [DL-1000/NC2P]
Maskless Lithography [MLA150]
ICP-RIE [RV-APS-SE]
FE-SEM+EDX [S-4800]
FE-SEM+EDX [SU8000]
FE-SEM+EDX [SU8230]
¥6,000 ¥9,000 N/A ¥8,000 ¥12,500 ¥17,000 ¥10,400 ¥16,250 ¥22,100
Other Instruments *3 ¥4,000 ¥7,000 N/A ¥5,000 ¥9,500 ¥14,000 ¥6,500 ¥12,350 ¥18,200

*1 Capital stock over 100 million yen = large enterprise, less than 100 million yen = small to medium-sized enterprise, universities and              public research institutes = academia
*2 Applicable only when “data provision” is selected and the data is registered on RDE system.
*3 ARIM (Data Provision) is not available for some equipment.

Remarks

  1. The table above shows the unit price per hour (tax excluded) and it will be multiplied by the usage hours*.
  2. 15-minute reservation is the minimum unit and the usage less than that time shall be reserved for 15 minutes.
  3. Self-Use: Instruments will be operated on your own upon issue of operation license.
  4. Technical Support: Training will be given for acquisition of operation license.
  5. Fabrication Service: Samples will be fabricated by the facility staff on behalf of the user.
  6. Instrument usage charges are included in the unit prices for technical support/fabrication service.

※"Usage hours" means the reservation time (=occupation of the instrument: including the time necessary for starting up/shutting down ).

Price Table for External Use

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  • 【Update】May. 09, 2023
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