NIMS Nanofabrication Unit Price Table (Large Enterprises) *1
※Applicable as of April 1st, 2024 (Tax Excluded)
| ARIM (Data Provision) *2 | ARIM (No Data Provision) | NOF (Undisclosed Use) | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Instrument List | Self-Use |
Operation Training |
Technical Service | Self-Use | Operation Training | Technical Service | Self-Use | Operation Training | Technical Service |
| EB Lithography [JBX-8100FS] | ¥29,500 | ¥37,500 | N/A | ¥57,000 | ¥73,000 | ¥89,000 | ¥74,100 | ¥94,900 | ¥115,700 |
| EB Lithography [ELS-BODEN100] | ¥18,500 | ¥26,500 | N/A | ¥35,000 | ¥51,000 | ¥67,000 | ¥45,500 | ¥66,300 | ¥87,100 |
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] ICP-RIE [RV-APS-SE] ICP-RIE [Spica #1] ICP-RIE [Spica #2] Ion Beam Milling [16IBE] FE-SEM+EDX [S-4800] FE-SEM+EDX [SU8000] FE-SEM+EDX [SU8230] |
¥13,000 | ¥21,000 | N/A | ¥24,000 | ¥40,000 | ¥56,000 | ¥31,200 | ¥52,000 | ¥72,800 |
| Other Instruments *3 | ¥7,500 | ¥15,500 | N/A | ¥13,000 | ¥29,000 | ¥45,000 | ¥16,900 | ¥37,700 | ¥58,500 |
NIMS Nanofabrication Unit Price Table (Small to Medium Enterprises) *1
※Applicable as of April 1st, 2024 (Tax Excluded)
| ARIM (Data Provision) *2 | ARIM (No Data Provision) | NOF (Undisclosed Use) | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Instrument List | Self-Use |
Operation Training |
Technical Service | Self-Use | Operation Training | Technical Service | Self-Use | Operation Training | Technical Service |
| EB Lithography [JBX-8100FS] | ¥24,000 | ¥30,400 | N/A | ¥29,500 | ¥37,500 | ¥45,500 | ¥38,350 | ¥48,750 | ¥59,150 |
| EB Lithography [ELS-BODEN100] | ¥15,200 | ¥21,600 | N/A | ¥18,500 | ¥26,500 | ¥34,500 | ¥24,050 | ¥34,450 | ¥44,850 |
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] ICP-RIE [RV-APS-SE] ICP-RIE [Spica #1] ICP-RIE [Spica #2] Ion Beam Milling [16IBE] FE-SEM+EDX [S-4800] FE-SEM+EDX [SU8000] FE-SEM+EDX [SU8230] |
¥10,800 | ¥17,200 | N/A | ¥13,000 | ¥21,000 | ¥29,000 | ¥16,900 | ¥27,300 | ¥37,700 |
| Other Instruments *3 | ¥6,400 | ¥12,800 | N/A | ¥7,500 | ¥15,500 | ¥23,500 | ¥9,750 | ¥20,150 | ¥30,550 |
NIMS Nanofabrication Unit Price Table (Start-ups・Academia) *1
※Applicable as of April 1st, 2024 (Tax Excluded)
| ARIM (Data Provision) *2 | ARIM (No Data Provision) | NOF (Undisclosed Use) | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Instrument List | Self-Use | Operation Training | Technical Service | Self-Use | Operation Training | Technical Service | Self-Use | Operation Training | Technical Service |
| EB Lithography [JBX-8100FS] | ¥13,000 | ¥16,200 | N/A | ¥18,500 | ¥23,300 | ¥28,100 | ¥24,050 | ¥30,290 | ¥36,530 |
| EB Lithography [ELS-BODEN100] | ¥8,600 | ¥11,800 | N/A | ¥11,900 | ¥16,700 | ¥21,500 | ¥15,470 | ¥21,710 | ¥27,950 |
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] ICP-RIE [RV-APS-SE] ICP-RIE [Spica #1] ICP-RIE [Spica #2] Ion Beam Milling [16IBE] FE-SEM+EDX [S-4800] FE-SEM+EDX [SU8000] FE-SEM+EDX [SU8230] |
¥6,400 | ¥9,600 | N/A | ¥8,600 | ¥13,400 | ¥18,200 | ¥11,180 | ¥17,420 | ¥23,660 |
| Other Instruments *3 | ¥4,200 | ¥7,400 | N/A | ¥5,300 | ¥10,100 | ¥14,900 | ¥6,890 | ¥13,130 | ¥19,370 |
*1 Capital stock over 100 million yen = large enterprise, less than 100 million yen = small to medium-sized enterprise.
If you're Start-up, please contact us.
*2 Applicable only when “data provision” is selected and the data is registered on RDE system.
*3 ARIM (Data Provision) is not available for some equipment.
Remarks
- The table above shows the unit price per hour (tax excluded) and it will be multiplied by the usage hours*.
- 15-minute reservation is the minimum unit and the usage less than that time shall be reserved for 15 minutes.
- Self-Use: Instruments will be operated on your own upon issue of operation license.
- Operation Training: Training will be given for acquisition of operation license.
- Technical Service: For those who have difficulty visiting NIMS, part of fabrication process will be carried out by staff.
- Instrument usage charges are included in the unit prices for operation training/technical service.
※"Usage hours" means the reservation time (=occupation of the instrument: including the time necessary for starting up/shutting down ).
